High purity NH₃

  • 순도

    - 4N ( 99.99%)
    - 5N (99.999%)
    - 6N (99.9999%)
    - 7N (99.99999%)
  • 데이터

    - 분자량 (17.03)
    - 비중 (0.7Kg/m³)
    - 증기밀도 (0.59(air=1))
    - CAS NO. (7664-41-7)
  • 용기

    - 47L cylinder
    - Y-cylinder (440L)
    - Ton cylinder (940L)
    - ISO tank
    - Tank rorry- etc
  • 규격

    - H₂O< 60ppb - N₂< 10ppb - CO< 10ppb - CO₂< 10ppb - As CH₄< 10ppb - H₂< 10ppb - O₂ + Ar< 10ppb * 7N Gas Phase

High purity Cl₂

  • 순도

    - 5N (99.999%)
    - 5N5 (99.9995%)
  • 데이터

    - 분자량 (70.906)
    - 비중 (1.4kg/m³)
    - 증기밀도 (2.49(air=1))
    - CAS NO. (7782-50-5)
  • 용기

    - 47L cylinder
    - Y-cylinder
    - Ton cylinder
  • 규격

    - H₂O< 1ppm - N₂< 1ppm - CO< 0.5ppm - CO₂< 0.5ppm - As CH₄< 0.5ppm - H₂< 0.1ppm - O₂ + Ar< 0.5ppm * 5N5